Dwivedi, Neeraj and Kumar, Sushil and Malik, Hitendra K. (2012) Superhard behaviour, low residual stress, and unique structure in diamond-like carbon films by simple bilayer approach. Journal of Applied Physics , 112 (2). 023518-023533. ISSN 0021-8979

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Abstract

Simple bilayer approach is proposed for synthesizing hard and superhard diamond-like carbon (DLC) coatings with reduced residual stress. For this, M/DLC bilayer (M = Ti and Cu) structures are grown using hybrid system involving radio frequency (RF)-sputtering and RF-plasma enhanced chemical vapor deposition techniques. Ti/DLC bilayer deposited at negative self bias of 100V shows superhard behaviour with hardness (H) as 49 GPa. Cu/DLC bilayer grown at self bias of 100V exhibits hard behaviour with H as 22.8GPa. The hardness of Ti/DLC (Cu/DLC) bilayer gets changed from superhard (hard) to hard (moderate hard) regime, when the self bias is raised to 300 V. Residual stress in Ti/DLC (Cu/DLC) bilayer is found to be significantly low that varies in the range of 1GPa-1.65GPa (0.8 GPa-1.6GPa). The microstructure and morphology are studied by Raman spectroscopy, scanning electron microscopy (SEM), and atomic force microscopy (AFM). SEM and AFM pictures reveal the creation of nanostructured features in the deposited bilayers. Raman, SEM, and AFM analyses are correlated with the nano-mechanical properties. Owing to excellent nano-mechanical properties, these bilayers can find their direct industrial applications as hard and protective coatings

Item Type:	Article
Additional Information:	copyright for this article belongs to M/s American Institute of Physics
Subjects:	Applied Physics/Condensed Matter
Divisions:	UNSPECIFIED
Depositing User:	Users 27 not found.
Date Deposited:	19 Aug 2026 10:55
Last Modified:	19 Aug 2026 10:55
URI:	https://npl.csircentral.net/id/eprint/3386

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