Gope, Jhuma and Kumar, Sushi and Sudhakar, S. and Rauthan, C. M. S. and Srivastava, P. C. (2013) Effect of silane flow rate on structural, electrical and optical properties of silicon thin films grown by VHF PECVD technique. Materials Chemistry and Physics, 141 (1). 89-94. ISSN 0254-0584