 | Up a level |
Group by: Item Type | No Grouping
Jump to: Article
Number of items: 1.
Article
Singh, Atul Vir and Chandra, Sudhir and Kumar, Sushil and Bose, G. (2012) Mechanical and structural properties of RF magnetron sputter-deposited silicon carbide films for MEMS applications. Journal of Micromechanics and Microengineering, 22 (2). 025010-025017. ISSN 0960-1317
