Items where Author is "Rauthan, C. M. S"

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Article

Tomer, Shweta and -, Vandana and Panigrahi, Jagannath and Srivastava, Ritu and Rauthan, C. M. S (2019) Importance of precursor delivery mechanism for Tetra-kis-ethylmethylaminohafnium/water atomic layer deposition process. Thin Solid Films, 692 ( 13762). 13762-1- 13762-7. ISSN 0040-6090

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