Panwar, Omvir Singh and Kesarwani, Ajay Kumar and Dhakate, Sanjay Rangnath and Singh, Bhanu Pratap and Rakshit, Rajib Kumar and Bisht, Atul and Chockalingam, Sreekumar (2013) Few layer graphene synthesized by filtered cathodic vacuum arc technique. Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures, 31 (4). 040602-040606. ISSN 1071-1023

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Abstract

Filtered cathodic vacuum arc technique has been used to deposit amorphous carbon (a-C) films of varying thicknesses from 10 nm to 38 nm on catalytic nickel thin film grown on SiO2/Si substrates. Subsequently, a-C films were annealed in vacuum in the temperature range from 650 to 850 degrees C. Micro-Raman spectroscopic study in combination with optical microscopy and scanning electron microscopy has revealed few layer graphene formations with optical transmittance in the range 85%-88% with a-C films deposited with 10 nm and 18 nm thicknesses. The optimum temperature of annealing was observed to be 750 degrees C.

Item Type:	Article
Additional Information:	copyright for this article belongs to M/s American Vacuum Society
Subjects:	Engineering > Electronics and Electrical Engineering Applied Physics/Condensed Matter Nanoscience/ Nanotechnology
Divisions:	UNSPECIFIED
Depositing User:	Users 27 not found.
Date Deposited:	19 Aug 2026 11:10
Last Modified:	19 Aug 2026 11:10
URI:	https://npl.csircentral.net/id/eprint/3220

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