Article

Chakraborty, B. R. and Halder, S. K. and Maurya, K. K. and Srivastava, A. K. and Toutam, V. K. and Dalai, M. K. and Sehgal, G. and Singh, S. (2012) Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures. Thin Solid Films, 520 (20). pp. 6409-6414. ISSN 0040-6090