Group by: Item Type | No Grouping Jump to: Article Number of items: 1. ArticleKumar, Rajesh and Rab, Shanay and Pant, B. D. and Maji, S. (2018) Design, development and characterization of MEMS silicon diaphragm force sensor. Vacuum, 153. pp. 211-216. ISSN 0042-207X |