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Singh, Atul Vir and Chandra, Sudhir and Srivastava, A. K. and Chakroborty, B. R. and Sehgal, G. and Dalai, M. K. (2011) Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating. Applied Surface Science, 257 (22). pp. 9568-9573. ISSN 0169-4332
