Srivatsa, K. M. K. and Chhikara, Deepak and Kumar, M. Senthil (2011) Synthesis of Anatase Titania Nanostructures at Room Temperature by PECVD Technique. Journal of Materials Science and Technology , 27 (8). pp. 696-700. ISSN 1005-0302

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Anatase titania nanostructures have been synthesized at room temperature by plasma enhanced chemical vapor deposition (PECVD) process on silicon (100) substrates using titanium tetraisopropoxide [Ti(OC(3)H(7))(4), TTIP] vapor, argon and oxygen mixtures under various deposition pressures. The deposited titania has been characterized for its structural, morphological and chemical composition by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray (EDX) spectroscopy and Fourier transform infrared (FTIR) spectroscopy recordings. With the variation of deposition pressure, titania assumes various nanostructures viz. nanocrystals, nanoparticles, noanorods and comb-like structure. EDX and FTIR measurements show that the deposited titania is of high chemical purity. The possible growth mechanisms for the observed titania nanostructures have been discussed.

Item Type: Article
Additional Information: Copyright for this article belongs to M/s Elsevier B.V.
Uncontrolled Keywords: Nanostructures; Plasma enhanced chemical vapor deposition; Anatase titania
Subjects: Materials Science
Metallurgy & Metallurgical Engineering
Depositing User: Mr. Abhishek Yadav
Date Deposited: 19 Oct 2012 07:53
Last Modified: 19 Oct 2012 07:53

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