Srivatsa, K. M. K. and Bera, Mrinmoyee and Basu, A. (2008) Preparation of large surface area rutile titania crystals at room temperature by PECVD with applied d.c. bias. Materials Letters , 62 (20). pp. 3527-3529. ISSN 0167-577X

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Abstract

Rutile titania crystals with large surface area have been synthesized by PECVD at room temperature using titanium tetraisopropoxide [TTIP] vapour and argon and oxygen mixtures on silicon (100) substrates, under an applied substrate bias of -350 V d.c. The XRD pattern confirms the crystallinity and phase of the crystals as rutile titania. SEM micrographs show the rutile titania crystals with largest lateral dimensions of about 400 x 600 nm, i.e. with relatively large surface areas. There are no reports on the preparation of rutile titania crystals with large surface areas.

Item Type:	Article
Additional Information:	Copyright for this article belongs to M/s Elsevier B.V.
Subjects:	Materials Science Physics
Divisions:	UNSPECIFIED
Depositing User:	Ms Neetu Chandra
Date Deposited:	12 Jan 2016 11:27
Last Modified:	12 Jan 2016 11:27
URI:	http://npl.csircentral.net/id/eprint/1658

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