Kesarwani, Ajay and Panwar, O. S. and Tripathi, R. K. and Chockalingam, Sreekumar (2013) Synthesis and characterization of phosphorus doped hydrogenated silicon films by filtered cathodic vacuum arc technique. In: 17th International Workshop on the Physics of Semiconductor Devices (IWPSD) , DEC 10-14, 2013 , Noida, INDIA .
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Abstract
Phosphorous doped hydrogenated silicon thin film has been deposited by filtered cathodic vacuum arc technique at different substrate temperatures at a fixed hydrogen gas pressure. X-ray diffraction, electrical conductivity and optical band gap and scanning electron microscopy have been used to characterize the properties of films
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | Engineering Materials Science |
| Divisions: | UNSPECIFIED |
| Depositing User: | Dr. Rajpal Walke |
| Date Deposited: | 20 Nov 2015 07:56 |
| Last Modified: | 20 Nov 2015 07:56 |
| URI: | http://npl.csircentral.net/id/eprint/1580 |
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